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Characterization of laser induced backside damage for gettering purposes

Author(s):
Eggermont, G.E.J. ( Philips Research Laboratories Sunnyvale )
Allison, D.F. ( Philips Research Laboratories Sunnyvale )
Gee, S.A. ( Philips Research Laboratories Sunnyvale )
Ritz, K.N. ( Philips Research Laboratories Sunnyvale )
Falster, R.J. ( Quantronix Corp. )
Gibbons, J.F. ( Stanford Electronic Laboratories )
1 more
Publication title:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
4
Pub. Year:
1982
Page(from):
615
Page(to):
620
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
Language:
English
Call no.:
M23500/4
Type:
Conference Proceedings

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