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Fast scanned energy beam induced explosive crystallization of ion implantation amorphized poly and single crystal silicon substrates

Author(s):
Lerme, M. ( CNET )
D'Ouville, T. Ternisien ( CNET )
Vu, Duy-Phack ( CNET )
Perio, A. ( CNET )
Rozgonyi, G.A. ( CNET )
Nguyen, V.T. ( CNET )
1 more
Publication title:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
4
Pub. Year:
1982
Page(from):
547
Page(to):
552
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
Language:
English
Call no.:
M23500/4
Type:
Conference Proceedings

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