On the influence of laser beam homogenity on the regrowth of ion implanted Si

On the influence of laser beam homogenity on the regrowth of ion implanted Si

Author(s):

Wielunski, M. ( Institute of Nuclear Research )
Auleytner, J. ( Institute of Physics, Polish Academy of Sciences )
Turos, A. ( Institute of Nuclear Research )
Wielunska, D. ( Institute of Nuclear Research )

Publication title:

Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposia proceedings

Ser. no.:

4

Pub. Year:

1982

Page(from):

299

Page(to):

303

Pub. info.:

New York: North Holland

ISSN:

02729172

ISBN:

9780444006936 [0444006931]

Language:

English

Call no.:

M23500/4

Type:

Conference Proceedings

Details

TDL ID:	ZA00018762
Series ID:	PA00000010
Conf. info. (Name):	Materials Research Society Annual Meeting
Conf. info. (Number):	1981
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1981.11.16-1981.11.19

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