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Thermal stability of ion implanted, laser annealed films

Author(s):
Wilson, S.R. ( Motorola, Inc., Semiconductor Research and Development Lab. )
Paulson, W.M. ( Motorola, Inc., Semiconductor Research and Development Lab. )
Tam, G. ( Motorola, Inc., Semiconductor Research and Development Lab. )
Gregory, R.B. ( Motorola, Inc., Semiconductor Research and Development Lab. )
White, C.W. ( Solid State Division, Oak Ridge National Lab. )
Appleton, B.R. ( Solid State Division, Oak Ridge National Lab. )
1 more
Publication title:
Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposia proceedings
Ser. no.:
4
Pub. Year:
1982
Page(from):
287
Page(to):
292
Pub. info.:
New York: North Holland
ISSN:
02729172
ISBN:
9780444006936 [0444006931]
Language:
English
Call no.:
M23500/4
Type:
Conference Proceedings

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