Dynamic behavior of nano second pulsed Nd:glass laser annealing in ion implanted silicon
- Author(s):
Takai, M. ( Faculty of Engineering Science, Osaka University ) Sato, Y. ( Faculty of Engineering Science, Osaka University ) Murakami, K. ( The Institute of Material Science, University of Tsukuba ) Gamo, K. ( Faculty of Engineering Science, Osaka University ) Minamisono, T. ( Faculty of Science, Osaka University ) Namba, S. ( Faculty of Engineering Science, Osaka University ) - Publication title:
- Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposia proceedings
- Ser. no.:
- 4
- Pub. Year:
- 1982
- Page(from):
- 91
- Page(to):
- 96
- Pub. info.:
- New York: North Holland
- ISSN:
- 02729172
- ISBN:
- 9780444006936 [0444006931]
- Language:
- English
- Call no.:
- M23500/4
- Type:
- Conference Proceedings
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