Multi-degree-of-freedom displacement measurement system using a diffraction grating
- Author(s):
- Publication title:
- Laser diodes and leds in industrial, measurement, imaging, and sensors applications II : testing, packaging, and reliability of semiconductor lasers V : 26-25 January 2000, San Jose, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3945
- Pub. Year:
- 2000
- Page(from):
- 150
- Page(to):
- 157
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819435620 [0819435627]
- Language:
- English
- Call no.:
- P63600/3945
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Micromotion measurement system for millistructure using diffraction grating
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Precise Measurement of Linear Displacements by Moire Fringes of Elongated Circular Gratings,
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Resolution enhancement using a diffraction grating for optical triangulation displacement sensors
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Accuracy enhancement of point triangulation probes for linear displacement measurement
SPIE - The International Society for Optical Engineering |
9
Conference Proceedings
Multipoint process monitoring system based on an acousto-optic tunable filter (AOTF)
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
New error-compensation method in a linear encoder using phase-shifted grating
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
6
Conference Proceedings
Novel cross-correlation algorithm for reducing noise-related errors in array-type optical triangulation displacement sensors
SPIE-The International Society for Optical Engineering |
Society for Experimental Mechanics |