Contactless Characterization of Doping Profiles in Silicon

Author(s):

• Zeni,L.
• Bemini,R.
• Pierri,R.

Publication title:

Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3895

Pub. Year:

1999

Page(from):

89

Page(to):

98

Pub. info.:

Pennington, N.J.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434975 [0819434973]

Language:

English

Call no.:

P63600/3895

Type:

Conference Proceedings