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Characterization of Mechanical Stresses of Device Isolation Structures by Micro-Raman Spectroscopy and Modelling

Author(s):
Joncs,S.K.
Allmed,M.
Bazley,D.J.
Beanlan,R.J.
Wolf,I.De
Hill,C.
Rothwell,W.J.
2 more
Publication title:
Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3895
Pub. Year:
1999
Page(from):
60
Page(to):
75
Pub. info.:
Pennington, N.J.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434975 [0819434973]
Language:
English
Call no.:
P63600/3895
Type:
Conference Proceedings

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