Experimental study of hydrogen-free DLC film deposition by XeCl(308 nm)pulsed laser ablation

Experimental study of hydrogen-free DLC film deposition by XeCl(308 nm)pulsed laser ablation

Author(s):

Li,T. ( Northwest Institute of Nuclear Technology(China)and Shanghai Institute of Optics and Fine Mechanics )
Liu,J.
Wang,L.

Publication title:

High-Power Laser Ablation II

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3885

Pub. Year:

2000

Page(from):

323

Page(to):

330

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434838 [0819434833]

Language:

English

Call no.:

P63600/3885

Type:

Conference Proceedings

Details

TDL ID:	ZA00018560
Series ID:	PA00000029
Conf. info. (Name):	Advanced High-Power Lasers and Applications : High-Power Laser Ablation
Conf. info. (Number):	1999 : 2nd
Conf. info. (Venue):	Osaka, Japan
Conf. info. (Date):	1999.11.01-1999.11.05

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