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Microfabrication of single-crystal silicon multiple torsional oscillators

Author(s):
Publication title:
Materials and Device Characterization in Micromachining II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3875
Pub. Year:
1999
Page(from):
104
Page(to):
112
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434722 [0819434728]
Language:
English
Call no.:
P63600/3875
Type:
Conference Proceedings

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