Embedded optical sensors and data processing for thin film deposition

Embedded optical sensors and data processing for thin film deposition

Author(s):

Robbins,D.J. ( Defense Evaluation and Research Agency Malvern )

Publication title:

Process and equipment control in microelectronic manufacturing : 19-20 May 1999, Edinburgh, Scotland

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3742

Pub. Year:

1999

Page(from):

198

Page(to):

204

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819432223 [0819432229]

Language:

English

Call no.:

P63600/3742

Type:

Conference Proceedings

Details

TDL ID:	ZA00018547
Series ID:	PA00000029
Conf. info. (Name):	Microelectronic Manufacturing Technologies : Process and Wquipment Control in Microelectronic Manufacturin
Conf. info. (Number):	1999
Conf. info. (Venue):	Edinburgh, Scotland
Conf. info. (Date):	1999.05.19-1999.05.20

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