Lithographic analysis of multipass gray writing strategy for electron-beam pattern generation

Lithographic analysis of multipass gray writing strategy for electron-beam pattern generation

Author(s):

Chabala,J.M. ( Etec Systems,Inc. )

Publication title:

Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3676

Pub. Year:

1999

Vol.:

Part1

Page(from):

80

Page(to):

99

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819431509 [0819431508]

Language:

English

Call no.:

P63600/3676

Type:

Conference Proceedings

Details

TDL ID:	ZA00018541
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Emerging lithographic technologies
Conf. info. (Number):	1999 : 3rd
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1999.03.15-1999.03.17

Similar Items:

1 Conference Proceedings Evaluation of a high-dose extended multipass gray writing system for 130-nm pattern generation Chabala,J.M., Weaver,S., Alexander,D., Pearce-Percy,H.T., Lu,M., Cole,D.M., Abboud,F.E. SPIE - The International Society for Optical Engineering	7 Conference Proceedings Initial benchmarking of a new electron-beam raster pattern generator for 130-to 100-nm maskmaking Sauer,C.A., Abboud,F.E., Babin,S.V., Chakarian,V., Ghanbari,A., Innes,R., Trost,D., III,F.Raymond SPIE - The International Society for Optical Engineering
2 Conference Proceedings Extension of graybeam writing for the 130-nm technology node Chabala,J.M., Abboud,F.E., Sauer,C.A., Weaver,S., Lu,M., Pearce-Percy,H.T., Hofmann,U., Vernon,M., Ton,D., Cole,D.M., … SPIE - The International Society for Optical Engineering	8 Conference Proceedings Investigation of lithography performance using multipass gray(MPG)with MEBES 5000 Dean,R.L., Alexander,D., Chabala,J.M., Coleman,T., Hartglass,C., Lu,M., Sauer,C.A., Weaver,S. SPIE - The International Society for Optical Engineering
3 Conference Proceedings Further advances in electron-beam pattern generation technology for 180-nm masks Abboud,F.E., Sauer,C.A., Vernon,M., Coleman,T.P., Dean,R.L., Wang,W., Prior,R., Lu,M., Weaver,S. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Multipass gray printing for a new MEBES 4500S mask lithography system Abboud,F.E., Dean,R.L., Doering,J.J., Eckes,W., Gesley,M.A., Hofmann,U., Mulera,T., Naber,R.J., Pastor,M., Phillips,W., … SPIE-The International Society for Optical Engineering
4 Conference Proceedings New MEBES pattern generator Chabala,J.M., Abboud,F.E., Weaver,S., Cole,D.M. SPIE - The International Society for Optical Engineering	10 Conference Proceedings Elements of an advanced pattern generator for 130- to 100-nm maskmaking Chakarina,V., Sauer,C.A., Shamoun,B., Chiles,F., Trost,D., Zywno,M., Hofmann,U., Teizel,R., Prior,R., III,F.Raymond, … SPIE - The International Society for Optical Engineering
5 Conference Proceedings Advanced electron-beam pattern generation technology for 180-nm masks Abboud,F.E., Sauer,C.A., Wang,W., Vernon,M., Prior,R., Pearce-Percy,H.T., Cole,D.M., Mankos,M. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Lithographic performance results for a new 50-kV electron-beam mask writer Chakarian,V., Bylciw,S.R., Sauer,C.A., Trost,D., Zywno,M., Teitzel,R., Raymond Ⅲ,F., Abboud,F.E. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Lithography and CD performance of advanced MEBES mask pattern generators Chabala,J.M., Cole,D.M., Pearce-Percy,H.T., Phillips,W., Lu,M., Weaver,S., Alexander,D., Coleman,T., Sauer,C.A., … SPIE - The International Society for Optical Engineering	12 Conference Proceedings 100-nm OPC mask patterning using raster-scan 50-kV pattern generation technology Abboud,F.E., Baik,K.-H., Chakarian,V., Cole,D.M., Daniel,J.P., Dean,R.L., Gesley,M.A., Lu,M., Naber,R.J., Newman,T.H., … SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12