Thick polysilicon surface-micromachined optically sensed accelerometer

Thick polysilicon surface-micromachined optically sensed accelerometer

Author(s):

Chen,Y.H. ( Cornell Univ. )
Wang,Y.Y.
Tien,N.C.

Publication title:

Silicon-based optoelectronics : 27-28 January 1999, San Jose, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3630

Pub. Year:

1999

Page(from):

190

Page(to):

197

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819431004 [0819431001]

Language:

English

Call no.:

P63600/3630

Type:

Conference Proceedings

Details

TDL ID:	ZA00018537
Series ID:	PA00000029
Conf. info. (Name):	Photonics West : Silicon-Based Optoelectronics
Conf. info. (Number):	1999
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	1999.01.27-1999.01.28

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