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At-wavelength characterization of DUV-radiation-induced damage in fused silica

Author(s):
Lee,S.H. ( Univ.of California/Berkeley and Lawrence Berkeley National Lab. )
Piao,F.
Naulleau,P.
Goldberg,K.A.
Gldharn,W.G.
Bokor,J.
1 more
Publication title:
Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3998
Pub. Year:
2000
Page(from):
724
Page(to):
731
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436160 [081943616X]
Language:
English
Call no.:
P63600/3998
Type:
Conference Proceedings

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