Optical characterization in the vacuum ultraviolet with variable angle spectroscopic ellipsometry:157 nm and below
- Author(s):
- Hilfiker,J.N. ( J.A.Woollam Co.,Inc. )
- Singh,B.
- Synowicki,R.A.
- Bungay,C.L.
- Publication title:
- Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3998
- Pub. Year:
- 2000
- Page(from):
- 390
- Page(to):
- 398
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436160 [081943616X]
- Language:
- English
- Call no.:
- P63600/3998
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
Society of Vacuum Coaters |
Society of Vacuum Coaters |
Society of Photo-optical Instrumentation Engineers |
3
Conference Proceedings
Refractive index measurements of photoresist and antireflective coatings with variable-angle spectroscopic ellipsometry
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
SUPERLATTICE OPTICAL PROPERTIES MEASURED BY VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY
Materials Research Society |
4
Conference Proceedings
Recent Developments in Spectroscopic Ellipsometry for Materials and Process Control
Society of Vacuum Coaters |
10
Conference Proceedings
Characterization of copper oxidation and reduction using spectroscopic ellipsometry
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Application of spectroscopic ellipsometry to characterization of optical thin films (Invited Paper)
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Fluoropolyrners for 157-nm lithography:optical properties from VUV absorbance and ellipsometry measurements
SPIE - The International Society for Optical Engineering |
12
Conference Proceedings
Optical Characterization of 4H-SiC by Variable Angle of Incidence Spectroscopic Ellipsometry
Trans Tech Publications |