Blank Cover Image

LOW ENERGY ION BEAM ASSISTED DEPOSITION OF LOW RESISTIVITY ALUMINUM USING TMAA

Author(s):
Publication title:
Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
316
Pub. Year:
1994
Page(from):
863
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992153 [1558992154]
Language:
English
Call no.:
M23500/316
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings MOLECULAR-DYNAMICS SIMULATIONS OF LOW-ENERGY ION/SURFACE INTERACTIONS DURING ION-BEAM-ASSISTED THIN FILM DEPOSITION

Feil, H.

MRS - Materials Research Society
7 Conference Proceedings EPITAXIAL PLANARIZATION USING ION BEAM ASSISTED DEPOSITION

Chang, Bertha P., Sonnenberg, Neville, McIntyre, Paul C., Cima, Michael J., Sun, Jonathan Z., Yu-Jahnes, Lock See

MRS - Materials Research Society
2 Conference Proceedings Orientation and Electrical Resistivity of Aluminum Oxide Films Prepared by Ion-Beam-Assisted Plasma CVD

Nakai, H., Harasaki, O., Shinohara, J.

MRS - Materials Research Society
8 Conference Proceedings Focused Ion Beam Micromachining of GaN Photonic Devices

Chyr, I., Steckl, A. J.

MRS - Materials Research Society
3 Conference Proceedings Low energy ion assisted vapor deposition

Zhou, X. W., Wadley, H. N. G.

MRS-Materials Research Society
9 Conference Proceedings ZnO nanocrystalline thin films prepared by ion beam enhanced deposition method

N. Y. Yuan, J. H. Li, Z. J. He, G. Li, X. Q. Wang

Society of Photo-optical Instrumentation Engineers
4 Conference Proceedings DEPOSITION OF ALUMINUM NITRIDE FILM BY ION BEAM ENHANCED REACTIVE MAGNETRON SPUTTERING

Huang, R. F., Wen, L. S., Wang, H., Wu, J., Hong, R. J.

Materials Research Society
10 Conference Proceedings HETEROEPITAXY ON GaAs ON Si AND Ge BY LOW-ENERGY ION BEAM DEPOSITION USING ALTERNATING BEAMS

Haynes, T. E., Zuhr, R. A., Pennycook, S. J,.

Materials Research Society
5 Conference Proceedings CARBON FILM DEPOSITION ON SILICON USING LOW ENERGY ION BEAMS

Fuguang, Qin, Zhenyu, Yao, Zhizhang, Ren, Lee, S. -T., Bello, I., Feng, X., Huang, L. J., Lau, W. M.

Materials Research Society
11 Conference Proceedings Scale-up of Y-Ba-Cu-O Superconducting Tapes Using Ion Beam Assisted Deposition and Metal Organic Chemical Vapor Deposition

V. Selvamanickam, H. G. Lee, X. Xiong, Y. Qiao, Y. Xie, J. Reeves, A. Knoll, Y. Li, K. Lenseth, R. Schmidt

Electrochemical Society
6 Conference Proceedings Low-energy focused ion-beam system for direct deposition

M. Ueda, S. Nagamachi, Y. Yamakage, H. Maruno, J. Ishikawa

Society of Photo-optical Instrumentation Engineers
12 Conference Proceedings Low-Energy Ion-Beam Etching

J.R. Kahn, H.R. Kaufman

Society of Vacuum Coaters
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12