FIRST RESULTS FROM THE LOS ALAMOS PLASMA SOURCE ION IMPLANTATION EXPERIMENT
- Author(s):
Rej, D. J. Conrad, J. R. Faehl, R. J. Gribble, R. J. Henins, I. Horswill, N. Kodali, P. Nastasi, M. Reass, W. A. Shamim, M. Sridharan, K. Tesmer, J. R. Walter, K. C. Wood, B. P. - Publication title:
- Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 316
- Pub. Year:
- 1994
- Page(from):
- 593
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992153 [1558992154]
- Language:
- English
- Call no.:
- M23500/316
- Type:
- Conference Proceedings
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