ION BEAM ASSISTED DEPOSITION-R&D TO PRODUCTION

ION BEAM ASSISTED DEPOSITION-R&D TO PRODUCTION

Author(s):: Hirvonen, James K.
Publication title:: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:: Materials Research Society symposium proceedings
Ser. no.:: 316
Pub. Year:: 1994
Page(from):: 545
Pub. info.:: Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:: 02729172
ISBN:: 9781558992153 [1558992154]
Language:: English
Call no.:: M23500/316
Type:: Conference Proceedings

Details

TDL ID:	ZA00018464
Series ID:	PA00000011
Conf. info. (Name):	Symposium on materials synthesis and processing using ion beams
Conf. info. (Number):	1993
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1993.11.29-1993.12.03

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