BINDING OF COPPER AND NICKEL TO CAVITIES IN SILICON FORMED BY HELIUM ION IMPLANTATION
- Author(s):
- Publication title:
- Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 316
- Pub. Year:
- 1994
- Page(from):
- 33
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992153 [1558992154]
- Language:
- English
- Call no.:
- M23500/316
- Type:
- Conference Proceedings
Similar Items:
Trans Tech Publications |
Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
MRS - Materials Research Society |
9
Conference Proceedings
Diffusion, Precipitation, and Cavity-Wall Reactions of Ion-Implanted Gold in Silicon
MRS - Materials Research Society |
Materials Research Society |
Materials Research Society |
5
Conference Proceedings
SEGREGATION GEY?ERING BY IMPLANTATION-FORMED CAVITIES AND B-Si PRECIPITATES IN SILICON
Electrochemical Society |
Materials Research Society |
6
Conference Proceedings
PHOTOLUMINESCENCE OF SILICON NANOSTRUCTURES FORMED BY ION BEAM IMPLANTATION
Materials Research Society |
12
Conference Proceedings
Deuterium permeation behavior in polrcristalline nickel implanted with nickeland helium ions
Kluwer Academic Publishers |