POLYCRYSTALLINE DIAMOND FILMS FOR X-RAY LITHOGRAPHY
- Author(s):
Whitehair, S. J. Yehoda, J. E. Fuentes, R. Roy, R. A. Guarnieri, C. R. Cuomo, J. J. - Publication title:
- Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 306
- Pub. Year:
- 1993
- Page(from):
- 97
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992023 [1558992022]
- Language:
- English
- Call no.:
- M23500/306
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Nondestructive characterization and application of doped and undoped polycrystalline diamond films (Keynote Paper)
SPIE-The International Society for Optical Engineering |
Materials Research Society |
9
Conference Proceedings
EFFECTS OF SUBSTRATE PRETREATMENTS ON GROWTH OF POLYCRYSTALLINE DIAMOND THIN FILMS ON Si (100) SUBSTRATES
Materials Research Society |
Society of Vacuum Coaters |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
MRS - Materials Research Society |
6
Conference Proceedings
EPR and Optical Studies on as Grown Polycrystalline Diamond and Diamond Films Annealed between 1100 and 1900 K
Trans Tech Publications |
Materials Research Society |