MASK TECHNOLOGY FOR X-RAY NANOLITHOGRAPHY
- Author(s):
Schattenburg, M. L. Carter, J. Chu, W. Fleming, R. C. Ghanbari, R. A. Mondol, M. Polce, N. Smith, Henry I. - Publication title:
- Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 306
- Pub. Year:
- 1993
- Page(from):
- 63
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992023 [1558992022]
- Language:
- English
- Call no.:
- M23500/306
- Type:
- Conference Proceedings
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