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Evaluation of Amorphous Diamond-Like Carbon and Boron Nitride Films as Low Permittivity Dielectrics

Author(s):
Sullivan, J. P.
Friedmann, T. A.
Apblett, C. A.
Siegal, M. P.
Missert, N.
Lovejoy, M. L.
Mirkarimi, P. B.
McCarty, K. F.
3 more
Publication title:
Low-dielectric constant materials : synthesis and applications in microelectronics : symposium held April 17-19, 1995, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
381
Pub. Year:
1995
Page(from):
273
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992849 [1558992847]
Language:
English
Call no.:
M23500/381
Type:
Conference Proceedings

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