Preparation of Low-Density Xerogels at Ambient Pressure for Low K Dielectrics

Preparation of Low-Density Xerogels at Ambient Pressure for Low K Dielectrics

Author(s):

Publication title:

Low-dielectric constant materials : synthesis and applications in microelectronics : symposium held April 17-19, 1995, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

381

Pub. Year:

1995

Page(from):

261

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992849 [1558992847]

Language:

English

Call no.:

M23500/381

Type:

Conference Proceedings

Details

TDL ID:	ZA00018462
Series ID:	PA00000011
Conf. info. (Name):	Symposium on low-dielectric constant materials-synthesis and applications in microelectronics
Conf. info. (Number):	1995
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1995.04.17-1995.04.19

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