Blank Cover Image

Low Thermal Budget Processing of Organic Dielectrics

Author(s):
Publication title:
Low-dielectric constant materials : synthesis and applications in microelectronics : symposium held April 17-19, 1995, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
381
Pub. Year:
1995
Page(from):
117
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992849 [1558992847]
Language:
English
Call no.:
M23500/381
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings How Rapid Isothermal processing Can Be a Dominant Semiconductor Processing Technology in the 21st Century

Singh, R., Sharangpani, R., Cherukuri, K. C., Chen, Y., Dawson, D. W., Poole, K. F., Rohatgi, A., Narayanan, S., Thakur, …

MRS - Materials Research Society
7 Conference Proceedings ANALYSIS OF CRITICAL PARAMETERS AFFECTING THE TEMPERATURE UNIFORMITY DURING RAPID THERMAL PROCESSING

Nagabushnam, V., Singh, R. K., Thakur, R. P. S.

MRS - Materials Research Society
2 Conference Proceedings Enabling Thermal Processing of High- and Low-Dielectric-Constant Materials

Thakur, R. P. S., DeBoer, S. J., Singh, R.

MRS - Materials Research Society
8 Conference Proceedings Rapid Photothermal Processing of High Dielectric Constant Materials

Singh, R., Chen, Y., DeBoer, S., Thakur, R.P.S.

Electrochemical Society
3 Conference Proceedings Growth and Characterization of Thin Wet Oxides Grown by Rapid Thermal Processing

Sharangpani, R., Das, J., Tay, S. P., Thakur, R. P. S., Yang, T. C., Saraswat, K. C.

MRS - Materials Research Society
9 Conference Proceedings Rapid Thermal Processes of High Permittivity Films on Silicon for ULSI Gate Dielectrics Applications

Tay, S.P., Sharangpani, R., Hu, Y.Z.

Electrochemical Society
4 Conference Proceedings Direct Liquid Injection Assisted Chemical Vapor Deposition of Low Constant Materials

Sharangpani, R., Singh, R., Parihar, V., Thakur, R.P.S.

Electrochemical Society
10 Conference Proceedings Novel Applications of Rapid Photothermal Chemical Vapor Deposition

Singh, R., Parihar, V., Chen, Y., Poole, K. F., DeBoer, S., Thakur, R. P. S., Sharangpani, R., Vasudev, P. K.

MRS - Materials Research Society
5 Conference Proceedings ADVANCED DRAM CELL DIELECTRIC FILMS USING RAPID THERMAL PROCESSING

Thakur, R. P. S., Mathews, V. K., Fazan, P. C.

MRS - Materials Research Society
11 Conference Proceedings Direct Correlation Between Defects and Thermal Stress in Rapid Thermal Processing

Parihar, V., Venkataraman, S., Singh, R., Poole, K.F., Thakur, R.P.S.

Electrochemical Society
6 Conference Proceedings Chemical Vapor-Deposited Teflon Amorphous Fluoropolymer as an Interlevel Dielectric Material for Low Power Integrated Circuits

Sharangpani, R., Singh, R.

MRS - Materials Research Society
12 Conference Proceedings RECRYSTALLIZATION OF AMORPHOUS SILICON USING RAPID THERMAL PROCESSING LASER ANNEALING AND FURNACE HEATING

Viatella, J., Singh, R. K., Thakur, R. P. S., Sandhu, G., Harkness, S. D.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12