In Situ Spectroscopic Diagnostics of the Influence of Chamber Wall Polymer on Oxide Etch Rate

In Situ Spectroscopic Diagnostics of the Influence of Chamber Wall Polymer on Oxide Etch Rate

Author(s):

Publication title:

Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

544

Pub. Year:

1999

Page(from):

197

Pub. info.:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994508 [1558994505]

Language:

English

Call no.:

M23500/544

Type:

Conference Proceedings

Details

TDL ID:	ZA00018460
Series ID:	PA00000011
Conf. info. (Name):	Symposium on plasma deposition and treatment of polymers
Conf. info. (Number):	1998
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1998.11.30-1998.12.02

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