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PECVD of Fluorocarbon/Silicon Oxide Composite Thin Films From TFE and HMDSO

Author(s):
Publication title:
Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
544
Pub. Year:
1999
Page(from):
173
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994508 [1558994505]
Language:
English
Call no.:
M23500/544
Type:
Conference Proceedings

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