Blank Cover Image

Low-Energy Plasma-Enhanced Chemical Vapor Deposition

Author(s):
Publication title:
Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
533
Pub. Year:
1998
Page(from):
301
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994393 [1558994394]
Language:
English
Call no.:
M23500/533
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Low Energy Plasma Enhanced Chemical Vapour Deposition--Plasma Enhanced Deposition of Epitaxial Si and SiGe

Rosenblad, Carsten, Kummer, Matthias, Deller, Hans-Rudolf, Graf, Thomas, Dommann, Alex, Hackbarth, Thomas, Hock, Georg, …

Materials Research Society
7 Conference Proceedings Helicon wave plasma chemical vapor deposition of nanocrystalline silicon carbide films at low substrate temperature

Yu, W., Lu, W., Wang, B., Han, L., Fu, G.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Structural and electrical characterization of Si-MODFET structures grown at high rates by LEPECVD

Rosenblad, C., Kummer, M., Muller, E., Dommann, A., Kanel, H. Von

MRS-Materials Research Society
8 Conference Proceedings Introduction to Plasma Enhanced Chemical Vapor Deposition

Cale S. T., Raupp B. G., Rogers R. B., Myers R. F., Zirkle E. T.

kluwer Academic Publishers
3 Conference Proceedings PLASMA ETCHING AND SURFACE ANALYSIS OF a-SiC:H FILMS DEPOSITED BY LOW TEMPERATURE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

Thomas, J. H., III, Loboda, M. J., Seifferly, J. A.

MRS - Materials Research Society
9 Conference Proceedings Modeling and Control of Plasma Enhanced Chemical Vapor Deposition

Armaou, Antonios, Christofides, Panagiotis D.

American Institute of Chemical Engineers
4 Conference Proceedings GROWTH OF Ge-ON-Si STRUCTURES USING REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

Qian, Rong Z., Kinosky, D., Mahajan, A., Thomas, S., Fretwell, J., Munguia, P., Banerjee, S., Tasch, A.

Materials Research Society
10 Conference Proceedings Characterization of a-SiNx Thin Film Deposited by Inductively-Coupled Plasma-Enhanced Chemical Vapor Deposition

Han, Sang-Soo, Jun, Byung-Hyuk, No, Kwangsoo, Bae, Byeong-Soo

MRS - Materials Research Society
5 Conference Proceedings THE DEPENDENCE OF DEFECT DENSITY IN GeXSi1-X/Si HETEROSTRUCTURES GROWN BY REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION ON DEPOSITION PARAMETERS

Kinosky, D., Qian, R., Hsu, T., Irby, J., Mahajan, A., Thomas, S., Banerjee, S., Tasch, A., Magee, C., Grove, C. L.

Materials Research Society
11 Conference Proceedings Fabrication of a Free-Standing, Synthetic, Single Crystal Diamond Plate Using Ion Implantation and Plasma-Enhanced Chemical Vapor Deposition

Posthill, J. B., Malta, D. P., Humphreys, T. P., Hudson, G. C., Thomas, R. E., Rudder, R. A., Markunas, R. J.

MRS - Materials Research Society
6 Conference Proceedings Low-Temperature Deposition of Transparent Ultra Water-Repellent Thin Films by Microwave Plasma Enhanced Chemical Vapor Deposition

Wu, Yunying, Inoue, Yasushi, Sugimura, Hiroyuki, Takai, Osamu

Materials Research Society
12 Conference Proceedings HF/ALCOHOL PREPARATION OF WAFERS FOR THE REDUCTION OF HAZE IN LOW TEMPERATURE Si EPITAXY BY REMOTE PLASMA CHEMICAL VAPOR DEPOSITION

Kinosky, D., Qian, R., Mahajan, A., Thomas, S., Munguia, P., Fretwell, J., Banerjee, S., Tasch, A., Magee, C.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12