Application of Energy-Filtering Transmission Electron Microscopy on Advanced IC Device Processing
- Author(s):
- Publication title:
- Electron microscopy of semiconducting materials and ULSI devices : symposium held Aprl 15-16, 1998, San Francisco, California, U. S. A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 523
- Pub. Year:
- 1998
- Page(from):
- 127
- Pub. info.:
- Warrendale, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994294 [1558994297]
- Language:
- English
- Call no.:
- M23500/523
- Type:
- Conference Proceedings
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