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Hydrogen Passivation and Ozone Oxidation of Silicon Surface

Author(s):
Publication title:
Hydrogen in semiconductors and metals : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
513
Pub. Year:
1998
Page(from):
37
Pub. info.:
Warrendale, Penn.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994195 [155899419X]
Language:
English
Call no.:
M23500/513
Type:
Conference Proceedings

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