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Process Optimization for Piezoelectric Films and Coatings

Author(s):
Sayer, M.
Zou, L.
Leclerc, B.
Lukacs, M.
Olding, T.
Schloss, J. H.
1 more
Publication title:
Ferroelectric thin films VI : symposium held November 30-December 4, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
493
Pub. Year:
1998
Page(from):
391
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993983 [1558993983]
Language:
English
Call no.:
M23500/493
Type:
Conference Proceedings

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