Comparison of Dry-Etch Techniques for GaN, InN, and AlN
- Author(s):
Shul, R. J. Vawter, G. A. Willison, C. G. Bridges, M. M. Lee, J. W. Pearton, S. J. Abernathy, C. R. - Publication title:
- Power semiconductor materials and devices : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 483
- Pub. Year:
- 1998
- Page(from):
- 103
- Pub. info.:
- Warrendale, Penn.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993884 [1558993886]
- Language:
- English
- Call no.:
- M23500/483
- Type:
- Conference Proceedings
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