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Characterization of Silicon Surfaces After Low-Temperature H2 Annealing Prior to Low-Temperature Atmospheric Pressure Epitaxial Silicon Growth

Author(s):
Publication title:
Structure and evolution of surfaces : symposium held December 2-5, 1996, Boston, Massachusette, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
440
Pub. Year:
1997
Page(from):
51
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993440 [1558993444]
Language:
English
Call no.:
M23500/440
Type:
Conference Proceedings

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