Deposition of Thin SiO2 Films on Polymers as a Hard-Coating Using a Microwave-ECR Plasma

Deposition of Thin SiO2 Films on Polymers as a Hard-Coating Using a Microwave-ECR Plasma

Author(s):

Sano, K.

Publication title:

Microwave processing of materials V : symposium held April 8-12, 1996, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

430

Pub. Year:

1996

Page(from):

647

Pub. info.:

Pittsburgh,, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993334 [1558993339]

Language:

English

Call no.:

M23500/430

Type:

Conference Proceedings

Details

TDL ID:	ZA00018449
Series ID:	PA00000011
Conf. info. (Name):	Symposium on microwave processing of materials
Conf. info. (Number):	5th
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1996.04.08-1996.04.12

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