Improvement in a-Si:H Properties by Inert Gas Plasma Treatment

Improvement in a-Si:H Properties by Inert Gas Plasma Treatment

Author(s):

Publication title:

Amorphous silicon technology, 1996 : symposium held April 8-12, 1996, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

420

Pub. Year:

1996

Page(from):

329

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993235 [1558993231]

Language:

English

Call no.:

M23500/420

Type:

Conference Proceedings

Details

TDL ID:	ZA00018448
Series ID:	PA00000011
Conf. info. (Name):	Symposium on amorphous silicon technology
Conf. info. (Number):	1996
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1996.04.08-1996.04.12

Similar Items:

1 Conference Proceedings Dopant Activation in Boron-Doped a-Si:H and a-SiC:H by Thermal Annealing and Light-Soaking Isomura, M., Hishikawa, Y., Tsuda, S. MRS - Materials Research Society	7 Conference Proceedings HIGH PERFORMANCE a-Si SOLAR CELLS AND NARROW BANDGAP MATERIALS Nakano, S., Kishi, Y., Ohnishi, M., Tsuda, S., Shibuya, H., Nakamura, N., Hishikawa, Y., Tarui, H., Takahama, T., … Materials Research Society
2 Conference Proceedings IMPROVEMENT IN PERFORMANCE OF a-SiGe:H SOLAR CELLS FOR MULTI-JUNCTION CELLS Maruyama, E., Yoshimine, Y., Terakawa, A., Sayama, K., Ninomiya, K., Hishikawa, Y., Tarui, H., Tsuda, S., Nakano, S., … Materials Research Society	8 Conference Proceedings A COMPARATIVE STUDY OF DEFECT STATES IN LIGHTSOAKED AND HIGH-TEMPERATURE-ANNEALED a-Si:H Saleh, Z.M., Tarui, H., Tsuda, S., Nakano, S., Kuwano, Y. Materials Research Society
3 Conference Proceedings IMPROVEMENT IN WIDE-GAP a-Si:H FOR HIGH-EFFICIENCY SOLAR CELLS Tsuge, S., Hishikawa, Y., Okamoto, S., Sasaki, M., Tsuda, S., Nakano, S., Kuwano, Y. Materials Research Society	9 Conference Proceedings POTENTIAL ROLE FOR CHARGED DANGLING BONDS IN TRANSIENT-LESR OF LIGHT-SOAKED a-Si:H Saleh, Z.M., Tarui, H., Tsuda, S., Nakano, S., Kuwano, Y. Materials Research Society
4 Conference Proceedings FABRICATION OF DEVICE-QUALITY WIDE-GAP a-Si:H FILMS AT VERY LOW SUBSTRATE TEMPERATURES Hishikawa, Y., Tsuge, S., Nakamura, N., Tsuda, S., Nakano, S., Ohnishi., M., Kuwano, Y. Materials Research Society	10 Conference Proceedings High-Quality Poly-Si Films Using an Excimer Laser Annealing Method for Giant-Microelectronics Application Kuriyama, H., Kuwahara, T., Wakisaka, K., Kiyama, S., Tsuda, S., Nakano, S. Electrochemical Society
5 Conference Proceedings HIGH QUALITY a-Si FILMS AND SUPERLATTICE STRUCTUR p-LAYER a-Si SOLAR CELLS Nakano, S., Tsuda, S., Takahama, T., Haku, H., Watanabe, K., Nishikuni, M., Hishikawa, Y., Kuwano, Y. Materials Research Society	11 Conference Proceedings Very Wide-Gap and Device-Quality a-Si:H From Highly H2 Diluted SiH4 Plasma Decomposed by High rf Power Kiyama, S., Okamoto, S., Terada, N., Terakawa, A., Wakisaka, K., Yata, S. Materials Research Society
6 Conference Proceedings MATERIAL CONTROL FOR HIGH-EFFICIENCY AMORPHOUS SILICON SOLAR CELLS Hishikawa, Y., Sasaki, M., Tsuge, S., Okamoto, S., Tsuda, S. Materials Research Society	12 Conference Proceedings Development of Stable a-Si/a-SiGe Tandem Solar Cell Submodules Deposited by a Very High Hydrogen Dilution at Low Temperature Shima, Masaki, Isomura, Masao, Maruyama, Eiji, Okamoto, Shingo, Haku, Hisao, Wakisaka, Kenichiro, Kiyama, Seiichi, … MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12