Recrystallization of Preamorphized Silicon Investigated by RBS and PAC

Recrystallization of Preamorphized Silicon Investigated by RBS and PAC

Author(s):

Rohrlack, G.

Publication title:

Amorphous silicon technology, 1996 : symposium held April 8-12, 1996, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

420

Pub. Year:

1996

Page(from):

313

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993235 [1558993231]

Language:

English

Call no.:

M23500/420

Type:

Conference Proceedings

Details

TDL ID:	ZA00018448
Series ID:	PA00000011
Conf. info. (Name):	Symposium on amorphous silicon technology
Conf. info. (Number):	1996
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1996.04.08-1996.04.12

Similar Items:

1 Conference Proceedings Hall Effect Measurements on Transmutation Doped Semiconductors Rohrlack,G., Freitag,K., Nathusius,Ch.von, Vianden,R., Gwilliam,R., Sealy,B.J. Trans Tech Publications	7 Conference Proceedings A NEW HAFNIUM-BERYLLIUM SYSTEM PRODUCED BY ION IMPLANTATION AND ANNEALING TECHNIQUES Soares, J. C., Melo, A. A., da Silva, M. F., Alves, E. J., Freitag, K., Vianden, R. North-Holland
2 Conference Proceedings Rutherford Backscattering and Photoluminescence Studies of Erbium Implanted GaAs Daly, S. E., Henry, M. O., Alves, E., Soares, J. C., Gwilliam, R., Sealy, B. J., Freitag, K., Vianden, R., Stievenard, … MRS - Materials Research Society	8 Conference Proceedings RBS Lattice Site Location and Damage Recovery Studies in GaN Alves, E., DaSilva, M. F., Soares, J. C., Bartels, J., Vianden, R., Abernathy, C. R., Pearton, S. J. MRS - Materials Research Society
3 Conference Proceedings The Chemical Identification of Defect Impurities Using Radioactive Isotopes Daly,S.E., Henry,M.O., Frehill,C.A., Freitag,K., Vianden,R., Rohrlack,G., Forkel,D. Trans Tech Publications	9 Conference Proceedings A COMPARISON OF LOW ENERGY BF2 IMPLANTATION IN Si AND Ge PREAMORPHIZED SILICON Ruggles, Gary A., Hong, Shin-Nam, Wortman, Jimmie J., Ozturk, Mehmet, Myers, Edward R., Hren, John J., Fair, Richard B. Materials Research Society
4 Conference Proceedings PAC-Study of Ternary Compound Formation by Ion Implantation Feuser,U., Vianden,R., Gwilliam,R., Jeynes,C., Sealy,B., Soares,J.C. Trans Tech Publications	10 Conference Proceedings Enhanced Dopant Diffusion Effects in 4H Silicon Carbide Phelps, G.J., Wright, N.G., Chester, E.G., Johnson, C.M., O'Neill, A.G., Ortolland, S., Horsfall, A.B., Vassilevski, K., … Trans Tech Publications
5 Conference Proceedings Laser-pulsed melting of hafnium-implanted nickel studied with TDPAC and RBS/channeling techniques Buene, L., Kaufmann, E.N., McDonald, M.L., Kothaus, J., Vianden, r., Freitag, K., Draper, C.W. North Holland	11 Conference Proceedings Enhanced Dopant Diffusion Effects in 4H Silicon Carbide Phelps, G.J., Wright, N.G., Chester, E.G., Johnson, C.M., O'Neill, A.G., Ortolland, S., Horsfall, A.B., Vassilevski, K., … Trans Tech Publications
6 Conference Proceedings LATTICE OCCUPATION DETERMINATION OF HAFNIUM IN Ni3Al BY PAC Bohn, H. G., Schumacher, R., Vianden, R. J. Materials Research Society	12 Conference Proceedings In situ laser recrystallization of CVD silicon films Leeden, G.A. van der, Young, R.T., Appleton, B.R., Narayan, J. North Holland

1

2

3

4

5

6

7

8

9

10

11

12