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Synchrotron White Beam Topography Studies of Residual Stress in SiC Single Crystal Wafers With Epitaxial Thin Films

Author(s):
Huang, W.
Wang, Q.
Dudley, M.
Chiang, F. P.
Parsons, J.
Fazi, C.
1 more
Publication title:
Evolution of epitaxial structure and morphology : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
399
Pub. Year:
1996
Page(from):
425
Pub. info.:
Pittsburgh, Pennsylvania: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993020 [1558993029]
Language:
English
Call no.:
M23500/399
Type:
Conference Proceedings

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