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DEPOSITION OF TITANIUM OXIDE FILMS FROM METAL-ORGANIC PRECURSOR BY ELECTRON CYCLOTRON RESONANCE PLASMA-ASSISTED CHEMICAL VAPOR DEPOSITION

Author(s):
Publication title:
Metal-organic chemical vapor deposition of electronic ceramics : Symposium held on November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
335
Pub. Year:
1994
Page(from):
117
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992344 [1558992340]
Language:
English
Call no.:
M23500/335
Type:
Conference Proceedings

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