Patterning of membrane masks for profection e-baem lithography
- Author(s):
Fetter,L.A. ( Lucent Technologies ) Biddick,C. Blakey,M.I. Liddle,A.J. Peabody,M.L. Novembre,A.E. Tennant,D.M. - Publication title:
- 16th Annual BACUS Symposium on Photomask Technology and Management
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2884
- Pub. Year:
- 1996
- Page(from):
- 276
- Page(to):
- 287
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422828 [0819422827]
- Language:
- English
- Call no.:
- P63600/2884
- Type:
- Conference Proceedings
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