Blank Cover Image

High contact resistance heavily doped silicided p+junctions

Author(s):
Publication title:
Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2874
Pub. Year:
1996
Page(from):
360
Page(to):
366
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422729 [081942272X]
Language:
English
Call no.:
P63600/2874
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings CHARACTERIZATION OF RAPID THERMALLY NITRATED TITATNIUM FILMS CONTACTING SILICIDED AND NON-SILICIDED JUNCTIONS

Chittipeddi, S., Kelly, M. J., Dziuba, C. M., Irwin, R. B., Kahora, P. M., Kannan, V. C, Cochran, W. T.

Materials Research Society
7 Conference Proceedings A New High-Temperature Furnace Chamber

Fantner,E.B., Koppelhuber-Bitschnau,B., Mautner,F.A., Doppler,P., Gautsch,J.

Trans Tech Publications
2 Conference Proceedings Long-Term Oxidation Resistance of (Ti,Al,Y)N Coatings at 800℃

M.S. Li, C.J. Feng, F.H. Wang, W.T. Wu

Trans Tech Publications
8 Conference Proceedings Monitoring of Mobile Sodium Ions in SiO2 Using Corona Charging

Stevie, F.A., Persson, E., DeBusk, D.K., Savchuk, A., Hoff, A.M., Edelman, P., Lagowski, J.

Electrochemical Society
3 Conference Proceedings THE EFFECT OF DISSOLVED OXYGEN AND DISSOLVED OZONE IN ULTRAPURE WATER ON N+ DOPED POLY- CRYSTALLINE SILICON TO N+ DOPED CRYSTALLINE SILICON CONTACT RESISTANCE

Satterfield, M.J., Anthony, B., Huffman, G., Walczyk, F.

Electrochemical Society
9 Conference Proceedings Monitoring of Mobile Sodium Ions in SiQ Using Corona Charging

Stevie,F.A., Persson,E., DeBusk,D.K., Savchuk,A., Hoff,A.M., Edelman,P., Lagowski,J.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Measurement and simulation of the effect of body tie resistance on PD-SOI amplifiers

Edwards, C.F., Tenbroek, B.M., Lee, M.S., Redman-White, W., Uren, M.J.

Electrochemical Society
10 Conference Proceedings OHMIC CONTACTS TO HEAVILY CARBON-DOPED p+-GaAs USING Ti/Si/Pd

Lee, H. S., Han, W. Y., Lu, Y., Cole, M. W., Lareau, R. T., Casas, L., Thompson, R. J., DeAnni, A., Jones, K. A., Yang, …

Materials Research Society
5 Conference Proceedings TITANIUM SILICIDE FORMATION ON HEAVILY DOPED ARSENIC-IMPLANTED SILICON

Dowben, S. L., Marsh, D. W., Smith, G. A., Lewis, N., Chow, T. P., Katz, W.

Materials Research Society
11 Conference Proceedings Ohmic Contact Formation to Doped GaN

Smith, L. L., Bremser, M. D., Carlson, E. P., Weeks, T. W., Jr., Huang, Y., Kim, M. J., Carpenter, R. W., Davis, R. F.

MRS - Materials Research Society
6 Conference Proceedings Hole trapping in molecularly doped polymers

Borsenberger,P.M., Gruenbaum,W.T., Lin,L.-B., Visser,S.A.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Study of Ni-Silicide Contacts to Si:C Source/Drain.

S. Mertens, Y. Cho, F. Nouri, R. Schreutelkamp, Y. Kim, P. Verheyen, J. Steenbergen, C. Vrancken, H. Bender, O. Richard, …

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12