Blank Cover Image

Back side emission microscopy for failure analysis

Author(s):
Publication title:
Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2874
Pub. Year:
1996
Page(from):
238
Page(to):
247
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422729 [081942272X]
Language:
English
Call no.:
P63600/2874
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Failure analysis of wafer-level reliability testing failure

Oh,C.K., Neo,S.P., Bi,J.H., Wu,Z.M., Goh,L.C., Redkar,S.

SPIE - The International Society for Optical Engineering
7 Conference Proceedings 304 mW green light emission by frequency doubling of a high-power 1060-nm DBR semiconductor laser diode

H. K. Nguyen, M. H. Hu, Y. Li, K. Song, N. J. Visovsky

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings Confocal microscopy scanned by digital micromirror device with stray light filters

C.-C. Hung, C.C. Lin, K.-M Yeh, Y.-C. Fang, J.-H. Wu

Society of Photo-optical Instrumentation Engineers
8 Conference Proceedings BEOL lithography for early development at the 65-nm node

DellaGuardia, R., Kwong, R.W., Li, W., Lawson, P., Burkhardt, M., Grauer, I.C., Wu, Q., Angyal, M., Hichri, H., …

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Practical approach for AAPSM image imbalance correction for sub-100-nm lithography

Cho, H.L., Lin, S.Y., Hsieh, F., Kroyan, A., Liu, H.-Y., Huang, J.H., Hsu, S.-H., Huang, I-H., Lin, B.S.-M., Hung, K.-C.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Back-side emission from filtered gold targets

Moon,S.J., Eder,D.C.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Well Thickness and Doping Effects, and Room-Temperature Emission Mechanisms in InGaN/GaN and GaN/AlGaN Multiple-Quantum-Wells

Zeng, K. C., Smith, M., Lin, J. Y., Jiang, H. X., Tang, H., Salvador, A., Kim, W., Morkoc, H., Khan, M. Asif

MRS - Materials Research Society
10 Conference Proceedings LBNL four-side buttable CCD package development

Oluseyi, H.M., Bercovitz, J.H., Karcher, A., Hernikl, C.D., Miller, T., Uslenghi, M., Roe, N., Bebek, C., Holland, S.E., …

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Long-period fiber grating effects with double-sided loading on fiber (Invited Paper)

Tang, C.-Y., Tseng, P.Y., Lin, C.-N., Yang, C.-C., Kiang, Y.-W., Ma, k.-J.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Investigation on the mechanism of the 193-nm resist linewidth reduction during the SEM measurement

Wu,C.-H.J., Huang,W.-S., Chen,K.-J.R., Archie,C.N., Lagus,M.E.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Resonance-enhanced functional third harmonic optical microscopy

Chu, S.-W., Chen, S.-Y., Tsai, T.-H., Liu, T.-M., Wu, S.-B., Biring, S., Wang, J.-K., Wang, Y.-L., Chen, K., Lin, B.-L., …

SPIE - The International Society of Optical Engineering
12 Conference Proceedings Method and theory of turn back point error

Liu,Y.-N., Zeng,J.-K., Liu,J.-Q., Wu,T.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12