Comparative Study of Hydrogenated Amorphous Carbon(a-C:H)Films Grown by PECVD Technique Using 13.56MHz and 100MHz Frequencies

Comparative Study of Hydrogenated Amorphous Carbon(a-C:H)Films Grown by PECVD Technique Using 13.56MHz and 100MHz Frequencies

Author(s):

Publication title:

Semiconductor Devices

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2733

Pub. Year:

1996

Page(from):

433

Page(to):

435

Pub. info.:

Bellingham, WA — New Delhi: SPIE-The International Society for Optical Engineering — Narosa

ISSN:

0277786X

ISBN:

9780819421142 [0819421146]

Language:

English

Call no.:

P63600/2733

Type:

Conference Proceedings

Details

TDL ID:	ZA00018408
Series ID:	PA00000029

Similar Items:

1 Conference Proceedings Electronic Properties of Nitrogen Diluted Hydrogenated Amorphous Carbon Films Sushil Kumar, Dixit,P.N., Sarangi,D., Bhattacharyya,R. Narosa Publishing House	7 Conference Proceedings STRUCTURAL AND ELECTRICAL PROPERTIES OF UNDOPED MICROCRYSTALLINE SILICON GROWN BY 70 MHz AND 13.56 MHz PECVD Fluckiger, R., Meier, J., Crovini, G., Demichelis, F., Giorgis, F., Pirri, C. F., Tresso, E., Pohl, J., Rigato, V., … MRS - Materials Research Society
2 Conference Proceedings Analysis of Dielectric Constants to Determine sp3/sp2 Ratio in Hydrogenated Amorphous Carbon Films Verma,B.S., Basu,A., Panwar,O.S., Dixit,P.N., Sarangi,D., Kar,M., Bhattacharyya,R. SPIE-The International Society for Optical Engineering, Narosa	8 Conference Proceedings Photothermal Deflection Spectroscopy and Space Charge Limited Conduction Studies in Diamond like Carbon Films Grown using Saddle Field Fast Atom Beam Source Sarangi,D., Panwar,O.S., Bhattacharyya,R. Narosa Publishing House
3 Conference Proceedings Hydrogen Evolution and Surface Morphology of Unannealed and Annealed Hydrogenated Amorphous Silicon Films Deposited in an Asymmetric PECVD System at Room … Panwar,O.S., Mukherjee,C., Seth,Tanay, Dixit,P.N., Bhattacharyya,R. SPIE-The International Society for Optical Engineering, Narosa	9 Conference Proceedings Capacitance-Voltage Characteristics of Metal-Diamond Like Carbon-Silicon Structures Sharma,Rajnish, Kumar,Sushil, Rauthan,C.M.S., Kumar,Sudheer, Prasad,B., Dixit,P.N., George,P.J., Bhattacharyya,R. SPIE - The International Society for Optical Engineering
4 Conference Proceedings Field Emission from Diamond like Carbon Films Grown by RF PECVD Technique Using Various Hydrocarbons Panwar,O.S., Kumar,Sushil, Rajput,S.S., Sharma,Rajnish, Bhattacharyya,R. SPIE - The International Society for Optical Engineering	10 Conference Proceedings Effects of Post Annealing and Material Stability on Undoped and n+ nc-Si:H Films Deposited at 75℃ Using 13.56 MHz PECVD Lee, Czang-Ho, Sazonov, Andrei, Nathan, Arokia Materials Research Society
5 Conference Proceedings Effect of Nitrogen Dilution on Mechanical Properties of Diamond Like Carbon Films Grown by Saddle Field Fast Atom Beam Source Sarangi,D., Panwar,O.S., Kumar,Sushil, Bhattacharyya,R. SPIE - The International Society for Optical Engineering	11 Conference Proceedings Growth of Polymorphous/Nanocrystalline Silicon Films Deposited by PECVD at 13.56 MHz Raniero, L., Martins, R., Aguas, H., Zang, S., Ferreira, I., Pereira, L., Fortunato, E., Boufendi, L. Trans Tech Publications
6 Conference Proceedings Polymorphous Silicon Films Produced in Large Area Reactors by PECVD at 27.12 MHz and 13.56 MHz Aguas, H., Raniero, L., Pereira, L., Fortunato, E., Cabarrocas, P. Roca i, Martins, R. Materials Research Society	12 Conference Proceedings High Rate Deposition Of Microcrystalline Silicon Solar Cells Using 13.56 Mhz Pecvd - Prerequisites And Limiting Factors Roschek, Tobias, Repmann, Tobias, Kluth, Oliver, Muller, Joachim, Rech, Bernd, Wagner, Heribert Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12