Growth of Submicron Heavily Doped Silicon Layers on Lightly Doped Silicon by RPCVD
- Author(s):
Arora,R.S. Venkateswaran,R. Haldar,T. Gupta,S.K. Kumar,Praveen Kesavan,R. - Publication title:
- Semiconductor Devices
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2733
- Pub. Year:
- 1996
- Page(from):
- 347
- Page(to):
- 349
- Pub. info.:
- Bellingham, WA — New Delhi: SPIE-The International Society for Optical Engineering — Narosa
- ISSN:
- 0277786X
- ISBN:
- 9780819421142 [0819421146]
- Language:
- English
- Call no.:
- P63600/2733
- Type:
- Conference Proceedings
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