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Monolithic integration of waveguide structures with surface-micromachined polysilicon actuators

Author(s):
Publication title:
Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2722
Pub. Year:
1996
Page(from):
75
Page(to):
81
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819420978 [0819420972]
Language:
English
Call no.:
P63600/2722
Type:
Conference Proceedings

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