Integrated mold/surface-micromachining process
- Author(s):
- Barron,C.C. ( Sandia National Labs. )
- Fleming,J.G.
- Montague,S.
- Sniegowski,J.J.
- Hetherington,D.L.
- Publication title:
- Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2722
- Pub. Year:
- 1996
- Page(from):
- 30
- Page(to):
- 35
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420978 [0819420972]
- Language:
- English
- Call no.:
- P63600/2722
- Type:
- Conference Proceedings
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