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One-step silicon nitride passivation by ECR-CVD for heterostructure transistors and MIS devices

Author(s):
Diniz, J.A. ( State University of Campinas (UNICAMP), Brazil )
de Barros, L.E.M., Jr.
Yoshioka, R.T.
Lujan, G.S.
Danilov, I.
Swart, J.W.
1 more
Publication title:
Compound semiconductor surface passivation and novel device processing : symposium held April 5-7, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
573
Pub. Year:
1999
Page(from):
137
Page(to):
142
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558994805 [1558994807]
Language:
English
Call no.:
M23500/573
Type:
Conference Proceedings

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