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Vertical scanning long trace profiler: a tool for metrology of x-ray mirrors

Author(s):
Publication title:
Materials, manufacturing, and measurement for synchrotron radiation mirrors : 30-31 July 1997, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3152
Pub. Year:
1997
Page(from):
180
Page(to):
187
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425744 [0819425745]
Language:
English
Call no.:
P63600/3152
Type:
Conference Proceedings

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