Manufacturing concepts and development trends in the industrial production of microelectromechanical systems

Manufacturing concepts and development trends in the industrial production of microelectromechanical systems

Author(s):

Schuenemann,M. ( Fraunhofer-Institute for Manufacturing Engineering and Automation (FRG) )

Grimme,R. ( Fraunhofer-Institute for Manufacturing Engineering and Automation (FRG) )

Kaufmann,T. ( Fraunhofer-Institute for Manufacturing Engineering and Automation (FRG) )

Schwaab,G. ( Fraunhofer-Institute for Manufacturing Engineering and Automation (FRG) )

Bader,U. ( Fraunhofer-Institute for Manufacturing Engineering and Automation (FRG) )

Schaefer,W. ( Fraunhofer-Institute for Manufacturing Engineering and Automation (FRG) )

Dorner,J. ( Fraunhofer-Institute for Manufacturing Engineering and Automation (FRG) )

2 more

Publication title:

Microrobotics and microsystem fabrication : 16-17 October 1997, Pittsburgh, Pennsylvania

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3202

Pub. Year:

1998

Page(from):

130

Page(to):

141

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426345 [0819426342]

Language:

English

Call no.:

P63600/3202

Type:

Conference Proceedings

Details

TDL ID:	ZA00018329
Series ID:	PA00000029
Conf. info. (Name):	Intelligent Systems and Advanced Manufacturing : Microrobotics and,Microsystem Fabrication
Conf. info. (Number):	1997
Conf. info. (Venue):	Pittsburgh, PA. USA
Conf. info. (Date):	1997.10.16-1997.10.17

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