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Force-balanced dual-axis microgyroscope

Author(s):
An,S. ( Samsung Advanced Institute of Technology (Korea) )
Oh,Y. ( Samsung Advanced Institute of Technology (Korea) )
Lee,B. ( Samsung Advanced Institute of Technology (Korea) )
Park,K. ( Samsung Electro-Mechanics Co. (Korera) )
Go,Y. ( Samsung Advanced Institute of Technology (Korea) )
Kim,J. ( Samsung Advanced Institute of Technology (Korea) )
Song,C. ( Samsung Advanced Institute of Technology (Korea) )
Lee,S.S. ( Pohang Univ.of Scinence and Technology (Korea) )
3 more
Publication title:
Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3242
Pub. Year:
1997
Page(from):
337
Page(to):
346
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426802 [0819426806]
Language:
English
Call no.:
P63600/3242
Type:
Conference Proceedings

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