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New method to fabricate diffractive blazed gratings by anisotropic etching on (110) silicon wafers

Author(s):
Publication title:
Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3242
Pub. Year:
1997
Page(from):
46
Page(to):
51
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426802 [0819426806]
Language:
English
Call no.:
P63600/3242
Type:
Conference Proceedings

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