High-average-power Ce:LiCaF laser at 1-KHz repetition rate tunable from 280 nm to 315 nm

High-average-power Ce:LiCaF laser at 1-KHz repetition rate tunable from 280 nm to 315 nm

Author(s):

Govorkov,S. ( Lambda Physik USA )

Wieｦﾂner,A. ( Lambda Physik USA )

Genter,P. ( Lambda Physik GmbH (FRG) )

Stamm,U. ( Lambda Physik GmbH (FRG) )

Zschocke,W. ( Lambda Physik GmbH (FRG) )

Schroder,T ( Lambda Physik GmbH (FRG) )

Basting,D. ( Lambda Physik GmbH (FRG) )

2 more

Publication title:

Laser Applications in Microelectronic and Optoelectronic Manufacturing III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3274

Pub. Year:

1998

Page(from):

60

Page(to):

65

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427137 [0819427136]

Language:

English

Call no.:

P63600/3274

Type:

Conference Proceedings

Details

TDL ID:	ZA00018323
Series ID:	PA00000029
Conf. info. (Name):	Photonics West : Laser Applications in Microelectronic and Optoelectronic Manufacturing
Conf. info. (Number):	1998 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	1998.01.26-1998.01.28

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